JPH01130526U - - Google Patents
Info
- Publication number
- JPH01130526U JPH01130526U JP2779388U JP2779388U JPH01130526U JP H01130526 U JPH01130526 U JP H01130526U JP 2779388 U JP2779388 U JP 2779388U JP 2779388 U JP2779388 U JP 2779388U JP H01130526 U JPH01130526 U JP H01130526U
- Authority
- JP
- Japan
- Prior art keywords
- fork
- heat treatment
- boat
- treatment furnace
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2779388U JPH01130526U (en]) | 1988-03-01 | 1988-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2779388U JPH01130526U (en]) | 1988-03-01 | 1988-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130526U true JPH01130526U (en]) | 1989-09-05 |
Family
ID=31250598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2779388U Pending JPH01130526U (en]) | 1988-03-01 | 1988-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130526U (en]) |
-
1988
- 1988-03-01 JP JP2779388U patent/JPH01130526U/ja active Pending
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